Mechanisms involved in modification of film structure and properties in ICP assisted dc and pulsed dc sputtering

Eiji Kusano

한국진공학회 학술발표회초록집

2015 .08

Analysis of a-IGZO channel layer deposited via Pulsed-DC sputtering

Jiwon Choi ,  Jaemin Kim ,  Eun-Chel Cho 외 1명

한국진공학회 학술발표회초록집

2021 .02

Sputtering growth of VO2 films at low temperature (175℃) for applications to flexible smart window

Dae Ho Jung ,  Hyeon Seob So ,  Kun Hee Ko 외 3명

한국진공학회 학술발표회초록집

2017 .02

Characteristic of Cu Film Controlled by Pulsed Power Using Magnetron Sputter System

김도한 ,  지유진 ,  김태형 외 4명

한국진공학회 학술발표회초록집

2017 .02

The comparative study of pure and pulsed DC plasma sputtering for synthesis of nanocrystalline Carbon thin films

Jin Xiang Piao ,  Manish Kuma ,  Amjed Javid 외 3명

한국진공학회 학술발표회초록집

2016 .02

SiO2 and TiO2 thin film deposited by DC pulsed magnetron sputtering with the process variable working pressure

Hye jin jeong ,  Moon Suhk Suh

한국진공학회 학술발표회초록집

2018 .08

Preparation of VO₂ thin film with high near IR modulation and high visible transmission by RF sputtering

Jung-Hoon YU ,  Sang-Hun NAM ,  Hyeon Jin SEO 외 5명

한국진공학회 학술발표회초록집

2016 .08

Effect of Hydrogen Addtion Ratio on pulsed dc-magnetron sputtered ITO film properties on amorphous/crystalline silicon heterojunction solar cell

Junyoung Kang ,  Sunbo Kim ,  Shihyun Ahn 외 1명

한국진공학회 학술발표회초록집

2015 .02

구조적 상전이를 갖는 VO₂ 와 결합된 Co/Pt 박막에서 온도에 따른 자기이방성 변화

정원준 ,  산토스기미르 ,  도중회

새물리

2020 .04

Increase in Coercive Field by Magnetoelastic Coupling in Co/VO₂ Films

Won Jun Jung ,  Joonghoe Dho

Journal of Magnetics

2020 .06

Optical Properties and Phase Transition in VO₂ and Ti:ZnO/VO₂ Thin Films

Chi ,  ag Saha ,  an 외 2명

Applied Science and Convergence Technology

2023 .07

Nitrogen doped Titanium Oxide Thin Films Fabricated by DC Magnetron Sputtering Method

H. Jee ,  J. W. Jang ,  S. J. Lee 외 1명

한국진공학회 학술발표회초록집

2020 .08

Pulsed laser deposition of Al (Ga) doped ZnO films

Ja ,  oslav BRUNCKO ,  And 외 8명

한국진공학회 학술발표회초록집

2016 .08

Spontaneous phase separation of In-doped β-Ga₂O₃ thin films grown by Radio Frequency Powder Sputtering

차수연 ,  강현철

한국진공학회 학술발표회초록집

2017 .08

Sputtering 공정 중 발생 된 in-film defect 분석 방법

정현재 ,  이선영 ,  김형우 외 1명

한국진공학회 학술발표회초록집

2017 .02

Bulk and Surface of Al2O3 doped ZnO Films at Different Target Angles by DC magnetron sputtering

Junyoung Kang ,  Hyeongsik Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2016 .02

Optimization for electrical and structural properties of aluminum thin films deposited on glass by DC magnetron sputtering

Shahinu ,  RAHMAN ,  Heon-Ju LEE 외 3명

한국진공학회 학술발표회초록집

2016 .08

Effect of pulsed magnetic field annealing on the resistance switching property of Fe doped ZnO thin films

Chunli Liu ,  Changjin Wu ,  Hongtao Xu 외 1명

한국자기학회 학술연구발표회 논문개요집

2016 .05

Effect of pulsed magnetic field annealing on the resistance switching property of Fe- and Co- doped ZnO thin films

Changjin Wu ,  Hongtao Xu ,  Chunli Liu

한국자기학회 학술연구발표회 논문개요집

2016 .11

Optimizing of a-IGZO TFT according to Pulse Duty ratio of Pulse-RF and Pulse-DC

Jaewoong Cho ,  Jaemin Kim ,  Eun-Chel Cho 외 1명

한국진공학회 학술발표회초록집

2021 .02