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Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure
Applied Science and Convergence Technology
2020 .11
Study on the electrical and optical diagnosis of electron temperatures according to conditions of plasma emission light intensity in inductively coupled plasma
한국진공학회 학술발표회초록집
2016 .08
Investigation of effect of rf bias frequency on plasma parameters in a remote inductively coupled plasma
한국진공학회 학술발표회초록집
2018 .08
A study on Electron Heating Mechanism in RF Capacitively Coupled Plasma at Low Discharge Current based on PIC-MCC simulation
한국진공학회 학술발표회초록집
2021 .02
Effects of the terminal capacitor on electron energy distribution function in a remote inductively coupled plasma
한국진공학회 학술발표회초록집
2020 .08
Control of spatial distribution of plasma density by the variable capacitor in a capacitively coupled plasma
한국진공학회 학술발표회초록집
2018 .08
Initial Study of Electron Temperature and Density Simulation on Capacitively Coupled RF He Plasma
한국진공학회 학술발표회초록집
2019 .08
Dry etching of Al₂O3 thin films in inductively coupled plasma system
한국진공학회 학술발표회초록집
2016 .08
Analysis of chemical reactions of CF₄ and C₄F8 for inductively coupled plasma based on plasma parameters
한국진공학회 학술발표회초록집
2019 .08
Control of electron energy distribution by hybrid plasma source in low gas pressure
한국진공학회 학술발표회초록집
2020 .08
Si Fin etching using Cl₂/Ar Sync, Asynchronized Pulsed Inductively Coupled Plasmas
한국진공학회 학술발표회초록집
2020 .08
Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas
한국진공학회 학술발표회초록집
2020 .08
Possible interplay between electron-electron and electron-phonon interactions in graphene
한국진공학회 학술발표회초록집
2018 .08
Oxide 및 Nitride 고선택비 식각 공정에서의 CF4(CHF3)/O2/Ar inductively coupled pulsed plasmas
한국진공학회 학술발표회초록집
2020 .02
Inductively Coupled Plasma 장치에서 Hybrid Plasma Model을 활용한 C₂F8/ O₂ 가스의 특성 해석
한국진공학회 학술발표회초록집
2019 .08
Microtrenching of SiO₂ contact hole etching in C₄F8/Ar capacitively coupled plasma
한국진공학회 학술발표회초록집
2017 .08
Electron impact scattering cross sections of C₂F₂ for plasma application
한국진공학회 학술발표회초록집
2016 .08
Characteristics of the Plasma Source for Ground Ionosphere Simulation Surveyed by Disk-Type Langmuir Probe
Journal of Astronomy and Space Sciences
2017 .12
Experimental investigation on the plasma generation efficiency and plasma parameters in inductively coupled plasmas with a serial and a parallel antenna
한국진공학회 학술발표회초록집
2017 .08
Research on parallelization mechanism of inductively coupled plasma for large area plasma source
한국진공학회 학술발표회초록집
2016 .02
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